Specific Process Knowledge/Thin film deposition/Electroplating-Ni: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Parameter | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Parameter | ||
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|style="background:LightGrey; color:black"|Diameter | |style="background:LightGrey; color:black"|Diameter | ||
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100 or 150 mm 4" or 6") | 50, 100 or 150 mm (~ 2", 4" or 6") | ||
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|style="background:LightGrey; color:black"|Sample thickness | |||
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Maximum 1,0 mm | |||
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|style="background:LightGrey; color:black"|Temperature | |style="background:LightGrey; color:black"|Temperature | ||
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52*C | |||
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|style="background:LightGrey; color:black"|pH | |style="background:LightGrey; color:black"|pH | ||
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3,5 - 3,8 | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Sample requirements | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Sample requirements | ||
|style="background:LightGrey; color:black"|Seed metal | |style="background:LightGrey; color:black"|Seed metal | ||
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100 nm of either NiV, Ti | 100 nm of either NiV, Ti+Au or Cr+Au recommended. Most commonly seed metals are sputtered using the [[Specific Process Knowledge/Thin film deposition/Lesker|Sputter-System(Lesker)]]. | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
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Most materials allowed. See below. | |||
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| style="background:LightGrey; color:black"|Forbidden materials | | style="background:LightGrey; color:black"|Forbidden materials | ||