Jump to content

Specific Process Knowledge/Lithography/Development: Difference between revisions

Taran (talk | contribs)
Taran (talk | contribs)
Line 370: Line 370:


'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=154 LabManager]'''
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=154 LabManager]'''
===Process information===


Development time is strongly dependent on the SU-8 thickness. Here are some suggestions:
Development time is strongly dependent on the SU-8 thickness. Here are some suggestions: