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Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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*Pyrolysis of different resist layers to form conductive structures
*Pyrolysis of different resist layers to form conductive structures
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range
!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameter range
|style="background:LightGrey; color:black"|Temperature
|style="background:LightGrey; color:black"|Temperature
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*Temperature ramp-up rate: Max 10 <sup>o</sup>C/min
*Temperature ramp-up rate: Max 10 <sup>o</sup>C/min
*Temperature ramp-down rate: Relative slow (depending on the furnace temperature)
*Temperature ramp-down rate: Relative slow (depending on the furnace temperature)
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|style="background:LightGrey; color:black"|Process gasses
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*N2
*H2
*O2
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|style="background:LightGrey; color:black"|Vacuum
|style="background:LightGrey; color:black"|Vacuum
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