Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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{| {{table}} | {| {{table}} | ||
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! Values from SAT (Nov. 2012) | ! Values from SAT (Nov. 2012) | ||
! Previous value (Oct 2014) | ! Previous value (Oct 2014) | ||
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| Repetition rate : 200kHz | | Repetition rate : 200kHz | ||
* 355nm : 11,93W | * 355nm, F103mm : 11,93W | ||
* 532nm : 24,62W | * 532nm, F255mm : 24,62W | ||
* 1064nm : 34,24W | * 1064nm, F255mm : 34,24W | ||
Repetition rate : 1000 kHz | Repetition rate : 1000 kHz | ||
* 355nm : 4,28W | * 355nm, F103mm : 4,28W | ||
* 532nm : 18,40W | * 532nm, F255mm : 18,40W | ||
* 1064nm : 40,09W | * 1064nm, F255mm: 40,09W | ||
Repetition rate : 8000 kHz | Repetition rate : 8000 kHz | ||
* 355nm : 0,26W | * 355nm, F103mm : 0,26W | ||
* 532nm : 4,82W | * 532nm, F255mm : 4,82W | ||
* 1064nm : 42,40W | * 1064nm, F255mm : 42,40W | ||
| Repetition rate : 200kHz | | Repetition rate : 200kHz | ||
* 355nm : 2,86W | * 355nm, F103mm : 2,86W | ||
* 532nm : 20,716 W | * 532nm, F255mm : 20,716 W | ||
* 1064nm : 24,98 | * 1064nm, F255mm: 24,98 | ||
Repetition rate : 1000 kHz | Repetition rate : 1000 kHz | ||
* 355nm : 0,98 | * 355nm, F103mm : 0,98 | ||
* 532nm : 8,031 | * 532nm, F255mm: 8,031 | ||
* 1064nm : 29,44 | * 1064nm, F255mm: 29,44 | ||
Repetition rate : 8000 kHz | Repetition rate : 8000 kHz | ||
* 355nm :0,04 | * 355nm, F103mm :0,04 | ||
* 532nm : 1,954 | * 532nm, F255mm: 1,954 | ||
* 1064nm : 30,67 | * 1064nm, F255mm: 30,67 | ||
| Repetition rate : 200kHz | | Repetition rate : 200kHz | ||
* 355nm : 8W | * 355nm, F103mm : 8W | ||
* 532nm : 18,5W | * 532nm, F255mm: 18,5W | ||
* 1064nm : 29,07W | * 1064nm, F255mm: 29,07W | ||
Repetition rate : 1000 kHz | Repetition rate : 1000 kHz | ||
* 355nm : 2,34W | * 355nm, F103mm : 2,34W | ||
* 532nm : 13,53W | * 532nm : 13,53W | ||
* 1064nm : 35W | * 1064nm : 35W | ||
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Repetition rate : 8000 kHz | Repetition rate : 8000 kHz | ||
* 355nm : 0,09W | * 355nm, F103mm: 0,09W | ||
* 532nm : 3,22W | * 532nm, F255mm: 3,22W | ||
* 1064nm : 36,6W | * 1064nm, F255mm: 36,6W | ||
|} | |} | ||