Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 70: | Line 70: | ||
|5 points on one wafer, exclusion zone 15mm | |5 points on one wafer, exclusion zone 15mm | ||
|} | |} | ||
*'''1 DCH SU8 aut dsp Grst 100um''' | *'''1 DCH SU8 aut dsp Grst 100um''' | ||