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Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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Spin coating of SU-8 2075 on Spin Coater: RCD8 is...
Spin coating of SU-8 2075 on Spin Coater: RCD8 is...


''Flow names, process parameters, and test results:''
''Recipe names, process parameters, and test results:''
*'''1 DCH SU8 aut disp 100um'''
*'''1 DCH SU8 aut disp 100um'''
Spin-off: 30 s at 2100 rpm.
Spin-off: 30 s at 2100 rpm.
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