Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 38: | Line 38: | ||
==SU-8== | ==SU-8== | ||
*1 DCH SU8 | *1 DCH SU8 aut disp 100um | ||
*1 DCH SU8 | *1 DCH SU8 aut dsp Grst 100um | ||
==AZ 5214E== | ==AZ 5214E== | ||
| Line 38: | Line 38: | ||
==SU-8== | ==SU-8== | ||
*1 DCH SU8 | *1 DCH SU8 aut disp 100um | ||
*1 DCH SU8 | *1 DCH SU8 aut dsp Grst 100um | ||
==AZ 5214E== | ==AZ 5214E== | ||