Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
| Line 38: | Line 38: | ||
*1 DCH SU8 2075 aut disp 75um | *1 DCH SU8 2075 aut disp 75um | ||
*1 DCH SU8 2075 man disp 75um | *1 DCH SU8 2075 man disp 75um | ||
*1 DCH SU8 2075 aut disp Gyrset 75um | |||
*1 DCH SU8 2075 man disp Gyrset 75um | |||
==AZ 5214E== | ==AZ 5214E== | ||
*1 DCH 5214E man disp 1_5um | *1 DCH 5214E man disp 1_5um | ||