Specific Process Knowledge/Lithography/Coaters/Spin Coater: RCD8 processing: Difference between revisions
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=Standard recipes= | =Standard recipes= | ||
==General== | |||
*1 DCH Centering test | *1 DCH Centering test | ||
*1 DCH Chuck cleaning | *1 DCH Chuck cleaning | ||
*1 DCH Gyrset cleaning | *1 DCH Gyrset cleaning | ||
*1 DCH | ==SU-8== | ||
*1 DCH | *1 DCH SU8 2075 Adisp 75um | ||
*1 DCH | *1 DCH SU8 2075 Mdisp 75um | ||
*1 DCH | ==AZ 5214E== | ||
*1 DCH 5214E Mdisp 1_5um | |||
*1 DCH 5214E Mdisp 2_2um | |||
*1 DCH 5214E Adisp 1_5um | |||
*1 DCH 5214E Adisp 2_2um | |||
=Template recipes= | =Template recipes= | ||