Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
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!Recommended experiment/Workspace | !Recommended experiment/Workspace | ||
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'''QNM in air''' | '''QNM in air*''' | ||
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'''QNM in air''' | '''QNM in air*''' | ||
|'''QNM in air''' | |'''QNM in air*''' | ||
|'''TappingMode 300nm trench''' (for steps <~1µm) | |'''TappingMode 300nm trench''' (for steps <~1µm) | ||
'''Tappping mode in air - 6µm Deep Trench''' (for steps >1~µm) | '''Tappping mode in air - 6µm Deep Trench''' (for steps >1~µm) | ||
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*By choosing the work space QNM in air (Mechanical properties - ?? - QNM in air) ScanAsyst is included and so are the nanomechanical properties like modulus, adhesion, dissipation and deformation | '''*'''By choosing the work space QNM in air (Mechanical properties - ?? - QNM in air) ScanAsyst is included and so are the nanomechanical properties like modulus, adhesion, dissipation and deformation | ||
<br clear="all" /> | <br clear="all" /> | ||