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Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions

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Bghe (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
|For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.  
|For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.  
|For Steep/abrupt steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use but it will scan slower than Tapping mode.  
|For Steep/abrupt steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use and lower top wear.  
|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend '''Tapping mode'''.
|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefore we recommend '''Tapping mode'''.
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!Recommended experiment/Workspace
!Recommended experiment/Workspace
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'''ScanAsyst in air - roughness (<10nm)'''
'''QNM in air'''
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'''ScanAsyst in air'''
'''QNM in air'''
|'''ScanAsyst in air - steps'''
|'''QNM in air'''
|'''TappingMode 300nm trench''' (for steps <~1µm)
|'''TappingMode 300nm trench''' (for steps <~1µm)
'''Tappping mode in air - 6µm Deep Trench''' (for steps >1~µm)
'''Tappping mode in air - 6µm Deep Trench''' (for steps >1~µm)
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