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Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Difference between revisions

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Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,565 edits
Line 97: Line 97:
| Old      <!-- Showerhead -->
| Old      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cduv | 1]]      <!-- link processes -->
| Slightly over-etching to ensure complete absence of grass   <!-- keywords -->
| Slightly over-etching to ensure complete absence of grass   <!-- keywords -->
|-
|-
| polySi etch DUV mask  <!-- step -->
| polySi etch DUV mask  <!-- step -->
Line 135: Line 135:
| New      <!-- Showerhead -->
| New      <!-- Showerhead -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly1 | 1]]      <!-- link processes -->
| [[Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange/polySi/Cpoly1 | 1]]      <!-- link processes -->
|   <!-- keywords -->
| Very aggressive, unusable  <!-- keywords -->
|-
|-
| Cpoly2      <!-- step -->
| Cpoly2      <!-- step -->
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