Specific Process Knowledge/Doping: Difference between revisions
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*Boron (B<sub>2</sub>H<sub>6</sub> or BCl<sub>3</sub>) | *Boron (B<sub>2</sub>H<sub>6</sub> or BCl<sub>3</sub>) | ||
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*See more | *See more information at [http://www.ion-beam-services.com/about_us.htm IBS]. | ||
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*150 mm wafers (only Boron) | *150 mm wafers (only Boron) | ||
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See more information at [http://www.ion-beam-services.com/about_us.htm IBS]. | |||
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*Nitride | *Nitride | ||
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See more information at [http://www.ion-beam-services.com/about_us.htm IBS]. | |||
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