Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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The machine can be also used for spinning on the "difficult" surfaces like the substrates with holes, backside structures and unusual shapes. | The machine can be also used for spinning on the "difficult" surfaces like the substrates with holes, backside structures and unusual shapes. | ||
'''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=43 LabManager]''' | '''The user manual, user APV, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=43 LabManager]''' | ||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||