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Specific Process Knowledge/Doping: Difference between revisions

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!Process Temperature<sup>{{fn|1}}</sup>
!Process Temperature
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*900°C - 1150°C
*900°C - 1150°C
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<sup>{{fn|1}}</sup> In most cases you need a high temperature step to drive in and redistribute the dopants in the material. This is typically done at 800°C - 1100°C in either high temperature annealing furnaces or by rapid thermal annealing.


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