Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions

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==More information about de different modes==
==More information about de different modes==
===Contact, Tapping and peak force tapping===
Please flowing this link to Brukers homepage:
Please flowing this link to Brukers homepage:
[http://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/AFM/ApplicationNotes/Introduction_to_Brukers_ScanAsyst_and_PeakForce_Tapping_Atomic_Force_Microscopy_Technology_AFM_AN133.pdf Introduction_to_Brukers_ScanAsyst_and_PeakForce_Tapping_Atomic_Force_Microscopy_Technology_AFM_AN133.pdf]
[http://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/AFM/ApplicationNotes/Introduction_to_Brukers_ScanAsyst_and_PeakForce_Tapping_Atomic_Force_Microscopy_Technology_AFM_AN133.pdf Introduction_to_Brukers_ScanAsyst_and_PeakForce_Tapping_Atomic_Force_Microscopy_Technology_AFM_AN133.pdf]


===PeakForce tapping and quantitative nanomechanical mapping===
Please flowing this link to Brukers homepage:
[http://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/AFM/Publications/AL_Foster_April2012.pdf PeakForce tapping and Nanomechanical option]
[http://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/AFM/Publications/AL_Foster_April2012.pdf PeakForce tapping and Nanomechanical option]
===Peak Force KPFM (Kelvin Probe Force Microscopy)===
Please flowing this link to Brukers homepage:
[http://www.bruker.com/products/surface-analysis/atomic-force-microscopy/modes/modes/nanoelectrical-modes/pf-kpfm.html pf-kpfm.html]

Revision as of 13:26, 24 October 2014

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What scanning mode, experiment/workspace and probe should I select

Roughness measurements Topographic measurements with no steep/abrupt steps Steep/abrupt steps but no high aspect ratio High aspect ratio measurements
Recommended mode Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst mode because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. For Topographic measurements with no steep/abrupt steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. For Steep/abrupt steps but no high aspect ratio structures we still recommend ScanAsyst mode due to ease of use but it will scan slower than Tapping mode. For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend Tapping mode.
Recommended probes ScanAsyst in air ScanAsyst in air ScanAsyst in air for ScanAsyst mode

TAP300Al-G for Tapping mode

AR5T-NCHR

FIB6-400A

Recommended experiment/Workspace

ScanAsyst in air - roughness (<10nm)

ScanAsyst in air

ScanAsyst in air - steps TappingMode 300nm trench (for steps <~1µm)

Tappping mode in air - 6µm Deep Trench (for steps >1~µm)



More information about de different modes

Contact, Tapping and peak force tapping

Please flowing this link to Brukers homepage: Introduction_to_Brukers_ScanAsyst_and_PeakForce_Tapping_Atomic_Force_Microscopy_Technology_AFM_AN133.pdf

PeakForce tapping and quantitative nanomechanical mapping

Please flowing this link to Brukers homepage: PeakForce tapping and Nanomechanical option

Peak Force KPFM (Kelvin Probe Force Microscopy)

Please flowing this link to Brukers homepage: pf-kpfm.html