Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
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'''ScanAsyst in air''' | '''ScanAsyst in air''' | ||
|'''ScanAsyst in air - | |'''ScanAsyst in air - steps''' | ||
|''' | |'''TappingMode 300nm trench''' (for steps <~1µm) | ||
'''Tappping mode in air 6µm''' (for steps >1~µm) | '''Tappping mode in air - 6µm Deep Trench''' (for steps >1~µm) | ||
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