Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
| Line 41: | Line 41: | ||
'''ScanAsyst in air - roughness (<10nm)''' | '''ScanAsyst in air - roughness (<10nm)''' | ||
| | | | ||
'''ScanAsyst in air | '''ScanAsyst in air''' | ||
|'''ScanAsyst in air - steep steps''' | |'''ScanAsyst in air - steep steps''' | ||
|'''Tapping mode in air 300nm''' (for steps <~1µm) | |'''Tapping mode in air 300nm''' (for steps <~1µm) | ||