Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions

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 !Roughness measurements
-!Topographic measurements with no steep steps
+!Topographic measurements with no steep/abrupt steps
-!Steep steps but no high aspect ratio
+!Steep/abrupt steps but no high aspect ratio
 !High aspect ratio measurements
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 !Recommended mode
 |Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
-|For Topographic measurements with no steep steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
+|For Topographic measurements with no steep/abrupt steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
-|For Steep steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use but it will scan slower than Tapping mode.
+|For Steep/abrupt steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' due to ease of use but it will scan slower than Tapping mode.
 |For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend '''Tapping mode'''.
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