Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions
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!Recommended mode | !Recommended mode | ||
|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend '''ScanAsyst mode''' because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | ||
|For Topographic measurements with no steep steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | |For Topographic measurements with no steep steps we also recommend '''ScanAsyst mode''' due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use. | ||
|For Steep steps but no high aspect ratio structures we still recommend ScanAsyst but it will go slower than Tapping mode. | |For Steep steps but no high aspect ratio structures we still recommend '''ScanAsyst mode''' but it will go slower than Tapping mode. | ||
|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend | |For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend '''Tapping mode'''. | ||
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