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Specific Process Knowledge/Characterization/AFM: Atomic Force Microscopy/Workspaces: Difference between revisions

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!Generel description
!Recommended mode
|Generel description - Roughness measurements
|Roughness measurement can be done in both Contact, Tapping and ScanAsyst mode. We recommend ScanAsyst because of less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
|Generel description -  
|For Topographic measurements with no steep steps we also recommend ScanAsyst mode due to less chance of (non-uniform) deformation of the sample and less tip wear - and because of ease of use.
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|For Steep steps but no high aspect ratio structures we still recommend ScanAsyst but it will go slower than Tapping mode.
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|For High aspect ratio measurements we recommend Tapping mode. There is not yet a ScanAsyst probe developed for high aspect ratio. Therefor we recommend tapping mode.
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