Specific Process Knowledge/Doping: Difference between revisions
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!Substrate size | !Substrate size | ||
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* | *100 mm wafers | ||
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* | *100 mm wafers | ||
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*small samples | *small samples | ||
*50 mm wafers | *50 mm wafers | ||
* | *100 mm wafers | ||
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* | *100 mm wafers (Boron and Phosphor) | ||
* | *150 mm wafers (only Boron) | ||
|- | |- | ||