Specific Process Knowledge/Doping: Difference between revisions
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!Substrate size | !Substrate size | ||
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*<nowiki>#</nowiki> 100 mm wafers | *<nowiki>#</nowiki> 100 mm wafers | ||
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*<nowiki>#</nowiki> 100 mm wafers | *<nowiki>#</nowiki> 100 mm wafers | ||
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*<nowiki>#</nowiki> 100 mm wafers (Boron and Phosphor) | |||
*<nowiki>#</nowiki> 150 mm wafers (only Boron) | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
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*<nowiki>#</nowiki> small samples | *<nowiki>#</nowiki> small samples | ||