Specific Process Knowledge/Thermal Process/C1 Furnace Anneal-oxide: Difference between revisions
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|style="background:WhiteSmoke; color:black"|Oxidation: | |style="background:WhiteSmoke; color:black"|Oxidation: | ||
*Dry | *Dry | ||
*Wet: with steamer|- | *Wet: with RASIRC steamer | ||
|- | |||
!style="background:silver; color:black" align="center"|Performance | !style="background:silver; color:black" align="center"|Performance | ||
|style="background:LightGrey; color:black"|Film thickness | |style="background:LightGrey; color:black"|Film thickness | ||