Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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== SEM pictures == | == SEM pictures == | ||
=== 50nm === | |||
{| cellpadding="2" style="border: 1px solid darkgray;" | |||
! width="140" | dose [muC/cm2] | |||
! width="140" | 207 | |||
! width="150" | 219 | |||
! width="130" | 230 | |||
! width="130" | 242 | |||
|- border="0" | |||
| [[File:overview-10%.tif|120px]] | |||
| [[File:overview-5%.tif|120px]] | |||
| [[File:overview.tif|120px]] | |||
| [[File:overview+5%.tif|120px]] | |||
|- align="center" | |||
| Bronze star || Gold star || Green star | |||
|} | |||