Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 149: | Line 149: | ||
| Spot size | | Spot size | ||
| 10µm | | 10µm | ||
| 74µm | | 74µm / 90µm (IPG) | ||
|- | |- | ||
|[[media:26052014_LaserPulseEnergy.jpg|Pulse energy]] | |[[media:26052014_LaserPulseEnergy.jpg|Pulse energy]] | ||
| 0,07µJ (TB) | | 0,07µJ (TB) | ||
| 800 µJ (IPG | | 140µJ (TB) / 800 µJ (IPG) | ||
|- | |- | ||
| Pulse duration | | Pulse duration | ||