Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
| Line 111: | Line 111: | ||
|style="background:LightGrey; color:black"|Output power@100(laser IPG – nanosecond) | |style="background:LightGrey; color:black"|Output power@100(laser IPG – nanosecond) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
Repetition rate : 100kHz | Repetition rate : 2kHz to 100kHz | ||
* 1064nm : 80W | * 1064nm : 80W | ||