Specific Process Knowledge: Difference between revisions
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! | ! [[image:drying.jpg|thumb|150px|Drying Samples ]] | ||
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! | ! [[image:Making a layer 1.jpg|140px|Film Formation ]] | ||
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|Thermal Oxide growth | |Thermal Oxide growth | ||
Revision as of 08:15, 12 June 2014
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Overview of sample processing
| Clean the sample File:Cleaning.jpg |
|---|
| Drying Samples File:Drying.jpg |
|---|
| Make a layer on the sample or Film Formation File:Making a layer 1.jpg | |
|---|---|
| Thermal Oxide growth | |
| Thin Film deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
| Thermal treatment of the sample File:Thermal treatment 1.jpg |
|---|
Make a mask on the sample 
|
|---|
| Lithography |
| Imprinting |
| Transfer pattern into the sample |
|---|
| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition |
|---|
| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
|---|
| Characterize the sample |
|---|
| Back end of the sample |
|---|
| Chip/die mounting |
| Wire bonding |
| Dicing |
Overview of sample processing 2
| Film Formation | |
|---|---|
| Thermal Oxide growth | |
| Thin Film deposition | |
| Sputter deposition | |
| Thermal deposition | |
| E-beam evaporation | |
| CVD | |
| LPCVD | |
| PECVD | |
| Coating | |
| Spin coating | |
| Spray coating | |
| Electroplating | |
| Epitaxial growth |
| Thermal treatment of the sample File:Thermal treatment 1.jpg |
|---|
| Make a mask on the sample
|
|---|
| Lithography |
| Imprinting |
| Transfer pattern into the sample |
|---|
| Wet etch |
| Dry etch |
| Lift-off |
| Direct structure definition |
|---|
| Imprinting |
| LASER machining |
| Lithographic definition |
| Polymer Injection molding |
| Bonding samples together |
|---|
| Characterize the sample |
|---|
| Back end of the sample |
|---|
| Chip/die mounting |
| Wire bonding |
| Dicing |