Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 143: | Line 143: | ||
| 2000mm/s | | 2000mm/s | ||
|- | |- | ||
| [[media:fluence.jpg|Fluence]] | |||
| 0,01J/cm2 | | 0,01J/cm2 | ||
| 113J/cm2 | | 113J/cm2 | ||
| Line 151: | Line 151: | ||
| 74µm | | 74µm | ||
|- | |- | ||
|[[ | |[[media:PulseEnergy.jpg|Pulse energy]] | ||
| 0,03µJ | | 0,03µJ | ||
| 800 µJ | | 800 µJ | ||