Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
Appearance
| Line 161: | Line 161: | ||
| 4GW/cm2 | | 4GW/cm2 | ||
| 5400 GW/cm2 | | 5400 GW/cm2 | ||
|- | |||
| M^2 | |||
| | |||
| 1,3 | |||
|} | |} | ||
|- | |- | ||
| Line 161: | Line 161: | ||
| 4GW/cm2 | | 4GW/cm2 | ||
| 5400 GW/cm2 | | 5400 GW/cm2 | ||
|- | |||
| M^2 | |||
| | |||
| 1,3 | |||
|} | |} | ||
|- | |- | ||