Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Two alignment options are available: top side alignment (TSA) and back side alignment (BSA). IR-light alignment also an option. | Two alignment options are available: top side alignment (TSA) and back side alignment (BSA). IR-light alignment also an option. | ||
'''The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=201 LabManager] | '''The user manual(s), quality control procedure(s) and results and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=201 LabManager]''' | ||
===Process information=== | ===Process information=== | ||