Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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This section contains a description of some of the quality control designs. | This section contains a description of some of the quality control designs. | ||
'''ASE standisation designs:''' | |||
The quality control procedure on the ASE is using the daqmask 2 mask | The quality control procedure on the ASE is using the daqmask 2 mask | ||
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'''RIE standisation design:''' | |||
The quality control procedures on RIE2 is using the dASEfeRIE mask | The quality control procedures on RIE2 is using the dASEfeRIE mask | ||