Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Send your *.cif file or *.gds file (for 7" mask or masks with CD under 1.5µm only *.gds should be used) in an e-mail along with a text file describing your specs ([[mask_spec|example spec file]]). E-mail address can be found in [[Danchip_contact_information]]. Cost according to Danchip price list. | Send your *.cif file or *.gds file (for 7" mask or masks with CD under 1.5µm only *.gds should be used) in an e-mail along with a text file describing your specs ([[mask_spec|example spec file]]). E-mail address can be found in [[Danchip_contact_information]]. Cost according to Danchip price list. | ||
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== KS Aligner == | == KS Aligner == | ||