Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
| Line 119: | Line 119: | ||
====External links==== | ====External links==== | ||
*[http://www.wieweb.com Clewin download] | *[http://www.wieweb.com Clewin download] | ||
===Alignment marks location=== | ====Alignment marks location==== | ||
* KS Aligner MA6 | * KS Aligner MA6 | ||
* Aligner 6inch EVG620 | * Aligner 6inch EVG620 | ||