Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch): Difference between revisions
No edit summary |
No edit summary |
||
| Line 1: | Line 1: | ||
'''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/AOE_(Advanced_Oxide_Etch) click here]''' | '''Feedback to this page''': '''[mailto:labadviser@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Etch/AOE_(Advanced_Oxide_Etch) click here]''' | ||
[[Category: Equipment |AOE]] | [[Category: Equipment|AOE|AOE]] | ||
== Etching using the dry etch technique AOE (Advanced oxide etch) == | == Etching using the dry etch technique AOE (Advanced oxide etch) == | ||