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Specific Process Knowledge/Lithography/Development: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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*AZ 5214E
*AZ 5214E
*AZ 4562
*AZ 4562
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Development of
*AZ 5214E
*AZ 4562
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!style="background:silver; color:black" align="center" width="60"|Developer  
!style="background:silver; color:black" align="center" width="60"|Developer  
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(NaOH and sodium borate salt)
(NaOH and sodium borate salt)
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AZ 351B diluted 1:5 in water
(NaOH and sodium borate salt)
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!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Method
!style="background:silver; color:black" align="center" valign="center" rowspan="1"|Method
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Submersion
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|style="background:WhiteSmoke; color:black" align="center"|
Submersion
Submersion
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameters
|style="background:LightGrey; color:black"|Temperature
|style="background:LightGrey; color:black"|Temperature
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22°C
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|style="background:WhiteSmoke; color:black" align="center"|
22°C
22°C
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Manual
Manual
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Circulation and mechanical
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|style="background:LightGrey; color:black"|Rinse
|style="background:LightGrey; color:black"|Rinse
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DI water
DI water
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DI water
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates
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|style="background:WhiteSmoke; color:black" align="center"|
* 100 mm wafers
* 100 mm wafers
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* 100 mm wafers
* 150 mm wafers
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| style="background:LightGrey; color:black"|Allowed materials
| style="background:LightGrey; color:black"|Allowed materials
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Silicon, glass, and polymer substrates
Film or pattern of all types
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|style="background:WhiteSmoke; color:black" align="center"|
Silicon, glass, and polymer substrates
Silicon, glass, and polymer substrates
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|style="background:LightGrey; color:black"|Batch
|style="background:LightGrey; color:black"|Batch
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1-8  
1-8
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1-25 
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