Specific Process Knowledge/Lithography/Development: Difference between revisions
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====Procedure for making a new developer==== | ====Procedure for making a new developer==== | ||
1. | 1. Switch off the heater, and dump the old developer. | ||
2. Fill the bath with the developer mixture and heat it to | 2. 800ml "Developer AZ 351B" is mixed with 4000ml water in a special container in the fume hood. | ||
3. Fill the bath with the developer mixture, and heat it to 22°C before use. | |||
=== Equipment performance and process related parameters === | === Equipment performance and process related parameters === | ||