Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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*the entire 350W Hg-lamp spectrum, intensity in Constant Power mode: 5mW/cm<sup>2</sup> @ 365nm | *the entire 350W Hg-lamp spectrum, intensity in Constant Power mode: 5mW/cm<sup>2</sup> @ 365nm | ||
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*1000 W Hg(Xe)lamp | *1000 W Hg(Xe)lamp | ||
*near UV (350-450nm), mid UV (260-320nm), and deep UV (220-260nm) | *near UV (350-450nm), mid UV (260-320nm), and deep UV (220-260nm) | ||