Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Compared to exposure on KS-Aligner, the dose on Aligner-6inch is halved. | Compared to exposure on KS-Aligner, the dose on Aligner-6inch is halved. | ||
*1.5µm: 24.5 mJ/cm<sup>2</sup> corresponding to 3.5 seconds exposure at 7 mW/cm<sup>2</sup>. | *1.5µm: 24.5 mJ/cm<sup>2</sup> corresponding to 3.5 seconds exposure at 7 mW/cm<sup>2</sup>. | ||
*10µm: ~140 mJ/cm<sup>2</sup> corresponding to ~20 seconds exposure at 7 mW/cm<sup>2</sup>. | *10µm: ~140 mJ/cm<sup>2</sup> corresponding to ~20 seconds exposure at 7 mW/cm<sup>2</sup>. Multiple exposure with 10s pauses is recommended. | ||
'''AZ MiR 701''' ''Preliminary results'' | '''AZ MiR 701''' ''Preliminary results'' | ||