Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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'''AZ 5214E and AZ 4562''' | '''AZ 5214E and AZ 4562''' | ||
Compared to exposure on Aligner-6inch, the dose on KS-Aligner is doubled. | Compared to exposure on Aligner-6inch, the dose on KS-Aligner is doubled. | ||
*1.5µm: 35-49 mJ/cm<sup>2</sup> corresponding to 5-7 seconds exposure at 7 mW/cm<sup>2</sup>. | *1.5µm: 35-49 mJ/cm<sup>2</sup> corresponding to 5-7 seconds exposure at 7 mW/cm<sup>2</sup>. | ||
*2.2µm: 56-70 mJ/cm<sup>2</sup> corresponding to 8-10 seconds exposure at 7 mW/cm<sup>2</sup>. | |||
*4.2µm: ~140 mJ/cm<sup>2</sup> corresponding to ~20 seconds exposure at 7 mW/cm<sup>2</sup>. | |||
*10µm: ~280 mJ/cm<sup>2</sup> corresponding to ~40 seconds exposure at 7 mW/cm<sup>2</sup>. | |||
'''AZ MiR 701''' | '''AZ MiR 701''' | ||