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Specific Process Knowledge/Lithography/Development: Difference between revisions

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Taran (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, NLAB-Nlab307-labadviser-users-34891
3,526 edits
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===Process information===
===Process information===
*[[Specific Process Knowledge/Lithography/Coaters/Spin Track 1 + 2 processing|General Spin Track 1 + 2 process information]]
 
'''Standard development time:'''
 
'''AZ 5214E:'''
*1.5µm resist: 60 sec


=== Equipment performance and process related parameters ===
=== Equipment performance and process related parameters ===
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