Specific Process Knowledge/Lithography/LiftOff: Difference between revisions
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This bench is only for wafers with metal! | This bench is only for wafers with metal! | ||
'''The user manual, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''The user manual, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=71 LabManager]''' | ||
== Process information == | == Process information == | ||
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[[Image:Lift-off 4&6.JPG|300x300px|thumb|Lift-off (4", 6") in D-3]] | [[Image:Lift-off 4&6.JPG|300x300px|thumb|Lift-off (4", 6") in D-3]] | ||
'''The user manual, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | '''The user manual, and contact information can be found in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=255 LabManager]''' | ||
== Process information == | == Process information == | ||