Specific Process Knowledge/Lithography/UVExposure: Difference between revisions
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Specific use of the mask aligner can be found in the standard resist recipes. | Specific use of the mask aligner can be found in the standard resist recipes. | ||
[[Image:IMG_3078.jpg|300x300px|thumb|III-V Aligner positioned in | [[Image:IMG_3078.jpg|300x300px|thumb|III-V Aligner positioned in A-5]] | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||