Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[Specific Process Knowledge/Lithography/Mask_Design| here]]. | The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[Specific Process Knowledge/Lithography/Mask_Design| here]]. | ||
== Technical specifications == | |||
*[[/Spot size and optics|Spot size and optics]] | |||
== Process information [[Image:section under construction.jpg|70px]] == | == Process information [[Image:section under construction.jpg|70px]] == | ||
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The parameter filename extension is here set to .xls because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension. | The parameter filename extension is here set to .xls because of MediaWiki restrictions. The 3DMM laser software uses .par as parameter file extension. | ||
The file should be a pure text-file with no formatting codes etc. | The file should be a pure text-file with no formatting codes etc. | ||