Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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[[image:20140117_145654.jpg|300x300px|right|thumb|The Hummer sputter located coater in the 346 basement]] | [[image:20140117_145654.jpg|300x300px|right|thumb|The Hummer sputter located coater in the 346 basement]] | ||
The Balzer sputter coater is used to sputter a thin gold layer on different small samples (smaller | The Balzer sputter coater is used to sputter a thin gold layer on different small samples (smaller than 100 mm wafers). | ||
One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM. | One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM. | ||