Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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= The Hummer Sputter coater = | = The Hummer Sputter coater = | ||
[[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater in service area 3]] | [[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater located in service area 3]] | ||
The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers). | The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers). | ||
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= The Balzer Sputter coater = | = The Balzer Sputter coater = | ||