Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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= The Balzer Sputter coater = | = The Balzer Sputter coater = | ||
[[image:20140117_145654.jpg|300x300px|right|thumb|The Hummer sputter coater in | [[image:20140117_145654.jpg|300x300px|right|thumb|The Hummer sputter located coater in the 346 basement]] | ||
The | The Balzer sputter coater is used to sputter a thin gold layer on different small samples (smaller then 100 mm wafers). | ||
One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM. | One of the most effective ways to counter the problems with charging on non-conducting samples during SEM investigations is to apply a conducting coating to the surface. The Hummer sputter coater is an instrument that allows you to coat small samples with a gold layer. When securely grounded, i.e. connected electrically with a sample holder using aluminium tape or clamps the gold layer will effectively eliminate all charging problems in the SEM. | ||
The | The Balzer sputter coater is located in the 346 basement, room 907 (next to the SEM Jeol) . | ||
'''The user manual and contact information can be found in LabManager:''' | '''The user manual and contact information can be found in LabManager:''' | ||