Specific Process Knowledge/Thin film deposition/Sputter coater: Difference between revisions
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= The Hummer Sputter coater = | = The Hummer Sputter coater = | ||
[[image:Hummer.jpg| | [[image:Hummer.jpg|300x300px|right|thumb|The Hummer sputter coater in service area 3]] | ||
The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers). | The Hummer sputter coater is used to sputter a thin gold layer on different small samples (up to 100 mm wafers). | ||
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'''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Hummer click here]''' | '''Feedback to this page''': '''[mailto:thinfilm@danchip.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/Hummer click here]''' | ||
= The Balzer Sputter coater = | = The Balzer Sputter coater = | ||