Specific Process Knowledge/Back-end processing/Laser Micromachining Tool: Difference between revisions
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The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc. | The system is able to produce micro structures in different kinds of materials like metals, ceramics, composite materials, etc. | ||
It can produce features down to ~10µm size over a large area. It can scan over an area of up to ~15x15cm without moving the sample. By moving the sample on the large x-y-stage this area can be extended by stitching. | It can produce features down to ~10µm size over a large area. It can scan over an area of up to ~15x15cm without moving the sample. By moving the sample on the large x-y-stage this area can be extended by stitching. | ||
The laser can use Autocad DXF files for the pattern design. To create these files we recommend to use Clewin 5. See more info [[Specific Process Knowledge/Lithography/Mask_Design| here]]. | |||
== Process information [[Image:section under construction.jpg|70px]] == | == Process information [[Image:section under construction.jpg|70px]] == | ||