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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

Jmli (talk | contribs)
Jmli (talk | contribs)
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{| {{table}}
{| {{table}}
| align="center" |  
| align="center" |  
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:200px"
{| border="1" cellspacing="1" cellpadding="2"  align="center" style="width:500px"
 
! QC Recipe:
! QC Recipe:
! colspan="4" |Process A  
! colspan="4" |Process A  
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| align="center" valign="top"|
| align="center" valign="top"|
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:500px"
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width:200px"
!QC limits
!QC limits
!DRIE-Pegasus
!DRIE-Pegasus