Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions
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{| {{table}} | {| {{table}} | ||
| align="center" | | | align="center" | | ||
{| border="1" cellspacing="1" cellpadding="2" align="center" style="width: | {| border="1" cellspacing="1" cellpadding="2" align="center" style="width:500px" | ||
! QC Recipe: | ! QC Recipe: | ||
! colspan="4" |Process A | ! colspan="4" |Process A | ||
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| align="center" valign="top"| | | align="center" valign="top"| | ||
{| border="2" cellspacing="1" cellpadding="2" align="center" style="width: | {| border="2" cellspacing="1" cellpadding="2" align="center" style="width:200px" | ||
!QC limits | !QC limits | ||
!DRIE-Pegasus | !DRIE-Pegasus | ||